JPH0538526Y2 - - Google Patents

Info

Publication number
JPH0538526Y2
JPH0538526Y2 JP13178987U JP13178987U JPH0538526Y2 JP H0538526 Y2 JPH0538526 Y2 JP H0538526Y2 JP 13178987 U JP13178987 U JP 13178987U JP 13178987 U JP13178987 U JP 13178987U JP H0538526 Y2 JPH0538526 Y2 JP H0538526Y2
Authority
JP
Japan
Prior art keywords
irradiation
window
chamber
vacuum chamber
window flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13178987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6435654U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13178987U priority Critical patent/JPH0538526Y2/ja
Publication of JPS6435654U publication Critical patent/JPS6435654U/ja
Application granted granted Critical
Publication of JPH0538526Y2 publication Critical patent/JPH0538526Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Particle Accelerators (AREA)
JP13178987U 1987-08-28 1987-08-28 Expired - Lifetime JPH0538526Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13178987U JPH0538526Y2 (en]) 1987-08-28 1987-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13178987U JPH0538526Y2 (en]) 1987-08-28 1987-08-28

Publications (2)

Publication Number Publication Date
JPS6435654U JPS6435654U (en]) 1989-03-03
JPH0538526Y2 true JPH0538526Y2 (en]) 1993-09-29

Family

ID=31388176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13178987U Expired - Lifetime JPH0538526Y2 (en]) 1987-08-28 1987-08-28

Country Status (1)

Country Link
JP (1) JPH0538526Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011051064A (ja) * 2009-09-02 2011-03-17 Mori Seiki Co Ltd 工作機械
JP5707286B2 (ja) 2011-09-21 2015-04-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
JP6207824B2 (ja) 2012-10-01 2017-10-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ
JP5976147B2 (ja) * 2015-02-17 2016-08-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

Also Published As

Publication number Publication date
JPS6435654U (en]) 1989-03-03

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